MONITORING. CONTROL. ENGINEERING.
Connecting sensors, controllers and equipment signals.
From fault detection to engineering retrofits, tailored to your equipment.
01 / MONITORING & CONTROL
Integrate position and status signals
to detect equipment faults and enable a response.
Equipment MonitoringLoad Lock Position Detection
Combines motor encoder signals with optical position sensing to compare motor and slide positions, providing alarms and equipment stop signals when discrepancies are detected.
Dual position detection · Fault alarms · Controller integration
Chamber MonitoringO₂ Measuring System
Integrates an O₂ sensor with a controller to support chamber air leak monitoring and data feedback for equipment status observation.
SEMI2 certification
Specially designed zirconia for vacuum applications
Helium leak rate: <1E-8 mbar.l/s
02 / ENGINEERING RETROFITS
Starting with equipment interfaces, mechanical constraints and maintenance needs,
we assess refurbishment, functional upgrades and system integration.
For TEL flow meter applications, we plan controller interfaces between equipment commands and LFC modules, integrating flow measurement, control and actual flow feedback.
For SICONI PRODUCER GT component requirements, we assess top plate refurbishment, modification machining and new central diffuser fabrication.
For RTP lamp head cooling lines and dissimilar-material welding, we plan material and surface treatment improvements, supported by inspections to verify component quality.
03 / PARTS & SERVICE
Lamps, bellows and process parts
to meet equipment specifications and maintenance needs.
Vacuum System PartsBellows
New bellows, custom design and manufacturing, and repair services, with specifications and supply options reviewed for each application.
New parts · Custom design · Repair services
RTP / EPI PartsLamps
Lamps for RTP rapid heating, annealing and EPI epitaxy equipment, selected according to equipment and part specifications.
Heating lamps · Specification review · Parts supply
300 mm Wafer ApplicationsSi-Epi Parts
Our product range includes susceptors, preheat rings and lift pins for Si-Epi processes.
Susceptor · Preheat Ring · Lift Pin
ABOUT US
Founded in 2021, HUAN SHENG APPLIED CO., LTD. is headquartered in Hsinchu, with a service location in Guiren, Tainan. We focus on semiconductor Diff equipment applications, specializing in monitoring and control integration and engineering retrofits, supported by parts services for EPIG, RTO and RTP equipment.
From sensor and controller integration to component design and machining improvements, we develop monitoring and functional detection solutions based on each equipment configuration.
HUAN SHENG APPLIED
Monitoring & Control · Engineering Retrofits · Parts & Repair Support
Explore Monitoring Solutions ↗CONTACT
Contact us for monitoring integration, equipment retrofits or parts enquiries.
sy.sun@hsengapplied.com ↗